[Phone]  01.708.878.1994

[Email]   sales@inspecglobal.com


HOME

 

Inspec Global Trade Shows 

 

 

 

ZeroMicron Carriers

 

We are an authorized Rep for ZeroMicron, Contact us Today!

 

 


 

ZeroMicron Catalog - Oct 2013      PDF  File 
Waxless Mounting       PDF  File 
Application Note 13081201-B) Rough Polish - Pad Dresser       PDF  File
(Application Note 13081302-B) Final Polish - Pad Dresser        PDF  File
(Application Note 13082401-A) Proper Use of Shims and Inserts      PDF  File
Lowest Cost Per Wafer           PDF  File                                                         
Worlds Toughest Templates      PDF  File

 

[Phone]  01.708.878.1994

[Email]   sales@inspecglobal.com

Zeromicron® or ZM™, has perfected over many years of research and development, a patented new generation of advanced-design polishing templates, carriers, and CMP Holders, and other wafer polishing accessories. The Zeromicron® Team consists of a variety of technology industry veterans, together with a strong core of polishing experts with many years of direct hands-on experience in wafer polishing production, engineering, R&D, and management. This variety and depth of experience, combined with the exceptional patented ZM™ products, provides substantial advantages, and a wide range of strategic applications for it customers.

Zeromicron® has developed a wide variety of wafer polishing templates, carriers, CMP holders, pad conditioner tools, and various associated accessories. A key element to the patterned Zerommicron® designs is its s3 (Shim Spinning System). This major advancement in wafer polishing technology allows for the wafer to spin or rotate inside the template cavity or pocket during polishing. This dynamic feature provides for even and consistent polishing across the entire surface of the wafer.

We are an authorized Rep for ZeroMicron, Contact us Today!

[Phone]  01.708.878.1994

[Email]   sales@inspecglobal.com

The wafer rotation, or spinning effect, is achieved using two pieces, called the "SHIM" and the "INSERT". the shim is placed at the bottom of the template cavity, and the black napcon insert is placed on the top of the shim. The wafer is then placed on top of the napcon insert, and adheres to the insert through water suction (this is the clean wet process). The insert/shim combination then spins within the template/carrier cavity during polishing, while remaining firmly seated in the cavity at start up, and through out the polishing run. The Zeromicron® S3 system allow for rotation or spinning to occur at 3 different levels, the polishing table/platen, the polishing head, and the wafer within the template cavity. The relief of pressure against the cavity walls through the spinning process avoids wafer blowouts, drops, and eliminates damage to the wafer, the cavity wall, template, and the polishing pad.

We are an authorized Rep for ZeroMicron, Contact us Today!

[Phone]  01.708.878.1994

[Email]   sales@inspecglobal.com

The shims are provided in a variety of size and thickness, to accommodate all wafer diameters, material thicknesses, and polishing removal requirements. The different shim thicknesses allow for a broader range of material thickness to be polished with the same template, thus reducing the need for many templates with different cavity depths. This is accomplished by simply using a different thickness of shim to adjust cavity depth for a different thickness of material. Please see the Illustration provided to further describe the unique and effective features of the Zeromicron® S3 Shim Spinning System.

We are an authorized Rep for ZeroMicron, Contact us Today!

[Phone]  01.708.878.1994

[Email]   sales@inspecglobal.com


Contact us about your Carrier applications!

 


[Phone]  01.708.878.1994

[Email]   sales@inspecglobal.com